March 11, 2025 – IMEC, the holding of NV (ASML) and IMEC, a hub for research and innovation in nanoelectronics and digital technology, announces that it has signed a new strategic partnership agreement focused on research and sustainability.
The agreement has a five-year period and aims to provide valuable solutions in two areas by combining the knowledge and expertise of ASML and IMEC respectively. First, we will develop solutions that will advance the semiconductor industry and secondly develop initiatives that will develop sustainable innovation-focused initiatives.
The collaboration incorporates ASML product portfolio focused on developing high-end nodes using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, evelStar optical metrology, and HMI single and multi-beam technologies. These tools are installed on IMEC’s cutting-edge pilot lines and incorporated into EU and Flanders-funded nanoik pilot lines to provide the most sophisticated infrastructure of sub-2NMs to the international semiconductor ecosystem. The R&D focus area also includes silicon photonics, memory and advanced packages, providing complete stack innovation for future semiconductor-based AI applications in a variety of markets.
The new field of collaboration consists of important contributions to fund innovative ideas and activities in IMEC research funnels that bring environmental and social benefits.
Christophe Fouche, president and CEO of ASML, commented: It demonstrates its joint ambition to develop solutions for the semiconductor industry, and fits with its investment strategy for technology and innovation that benefits society as a whole. ”
Luc van Den Hove, president and CEO of ASML, says he is ASML president and CEO of ASML by further maturing the capabilities of his pilotline by including ASML’s complete product portfolio. AI-driven technology advancements. With IMEC focusing on sustainable innovation, explicitly including this in partnerships is a major addition. ”
The ASML investment in the partnership is complemented by the Chips joint venture and funds made available by the Flanders government (for the realization of the EU Chips Act nanoik pilot line) and the Dutch government (as a key project of general European interest).
The acquisition and operation of the Nanoic Pilot Line is jointly funded by the Chips Joint business by the European Union’s Digital Europe (101183266) and the Horizon Europe Program (101183277), as well as by the Chips Joint business. For more information, please see Nanoic-Project.eu. ”
Making the 0.55 NA technology available to IMEC was part of the next Gen-7A project (IPCEI22201) funded by the Dutch government as a key project of Common European Interests (IPCEI). For more information, see IPCEI ME/CT.
